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設計特征 A.直接驅動無鐵直線電機定位系統 B.運動和歸航 C.懸臂設計 DGLXY雙線導軌懸臂工作臺由Akribis的標準DGL系列模塊構成，具有很高的剛度和定位精度

詳情介紹：

設計特征

A.直接驅動無鐵直線電機定位系統

B.運動和歸航

C.懸臂設計

DGLXY雙線導軌懸臂工作臺由Akribis的標準DGL系列模塊構成，具有很高的剛度和定位精度

A = Table 2 (Bottom Axis) + Table 3 + 6.12 (Interface Mass, Kg)

B = A + Table 4

Effective Stroke/Top Axis Mass (g)	200	300
Motor Coil Size S2	17.04	20.44
Motor Coil Size S3	18.26	22.94
Motor Coil Size S4	20.74	23.24

Effective Stroke/Bottom Axis Mass (g)	200	300	400	500	600
Motor Coil Size S2	16.4	19.8	22.3	25.7	29.1
Motor Coil Size S3	18.9	22.3	24.9	28.3	31.7
Motor Coil Size S4	20.1	22.6	26.1	29.5	32

Performance Parameter

Specification Parameter	Unit	DGL180	DGL200
¹Straightness	μm	±3μm/25mm	±3μm/25mm
¹Straightness		NTE±10μm/300mm	NTE±10μm/300mm
¹Flatness		±3μm/25mm	±3μm/25mm
¹Flatness		NTE±10μm/300mm	NTE±10μm/300mm
Repeatability (1μm resolution)		±3μm (40μm scale pitch)	±3μm (40μm scale pitch)
Repeatability (0.5μm resolution)		±1.5μm (20μm scale pitch)	±1.5μm (20μm scale pitch)
Repeatability (0.1μm resolution)		±1μm (20μm scale pitch)	±1μm (20μm scale pitch)
Repeatability (Analogue)		±5 counts	±5 counts
X-Y Orthogonality	Arc-sec	10	10